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Figure 6
Comparison of the optical microscopy, low-resolution (LR) image (pixel size 24.09 µm × 8.03 µm) and PSR-STHXM image of the resolution test pattern: (a) large FOV PSR-STHXM image (pixel size 300 nm × 8.03 µm) reconstructed from 80 LR images. The scanning step of the specimen was 300 nm; the image size is 1.64 cm × 1.64 cm. (b) Spatial resolution evaluation by the edge spread function of the profile on the blue line in (a). The spatial resolution is 780 ± 40 nm. (c, f) Optical microscopy images, (d, g) LR images, and (e, h) zoomed-in views of the red and orange boxes shown in (a) are presented. The smallest features (25 µm line and 25 µm space) and some defects and cracks are resolved in PSR-STHXM images, as indicated by the red arrows.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 28| Part 3| May 2021| Pages 732-740
https://doi.org/10.1107/S1600577521001521
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