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Figure 7
Multimodal imaging of a tungsten Siemens Star with 70 nm minimum feature size using (a) ptychography, (b) XRF and (c) DPC. (d) A typical beam profile extracted from ptychography reconstructions at 12 keV. The ptychography scan was acquired out of focus, covering a 16 µm × 16 µm area. The zoomed-in area shows the detail of the high-resolution features in the reconstruction. XRF (Lα emission) and DPC maps of the Siemens Star were acquired simultaneously at focus with 50 ms dwell time and 40 nm scan steps per pixel. Scale bars in all pictures are 1 µm. The pixel size in the ptychographic reconstructions is 27 nm.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 28| Part 3| May 2021| Pages 1006-1013
https://doi.org/10.1107/S1600577521002502
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