Figure 5
Interlock structure for the vacuum system: each section is `OK' if all devices in it for pressure-detection are below 5 × 10−6 mbar; if not, it triggers the two gate valves at its borders to close in order to isolate the section, and the next gate valves in both directions (upstream and downstream) are closed as well. The beam permission is triggered to be `OFF' if any of the gate valves in the beamline is closed. |