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Figure 7
(a) Step scan in the Y direction where a laser interferometer verifies the motion by focusing on the sample holder and compares it with the absolute encoder located on the frame of the manipulator. (b) Same motion as in (a) but zoomed in on three steps. When the encoder shows a smooth approach to target position, the interferometer does the same. When the encoder shows a spike, the interferometer does the same.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 28| Part 4| July 2021| Pages 1059-1068
https://doi.org/10.1107/S1600577521004859
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