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Figure 8
Staircase motion with 100 nm steps in the (a) X, (b) Y and (c) Z direction. The noise level is only a fraction of the step, and the original position is reached after the motion.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 28| Part 4| July 2021| Pages 1059-1068
https://doi.org/10.1107/S1600577521004859
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