Figure 2
Ptychographic reconstruction of the fully illuminated MZP. The pixel size was 3.2 nm. (a,b) Back-propagated wavefields. (c,d) Line profiles showing a FWHM of 8.4 nm × 9.6 nm. (e) Intensity distribution in the focal plane. (f) Measured mean far-field intensity. The white bar is due to a detector gap. (g) Far-field intensity distribution obtained by FD simulations. The inset shows the simulated focal spot with a FWHM of 5.9 nm × 5.9 nm. The color bar of (f,g) is scaled logarithmically. Scalebars: (a,b) vertical 50 nm, horizontal 10 µm, (c–e) 25 nm, (f,g) q = 0.26 nm−1, inset (g) 25 nm. |