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Figure 3
Ptychographic reconstruction of the off-axis illuminated MZP. The pixel size was 3.0 nm. (a, b) Back-propagated wavefield. (c, d) Line profiles from the same plane showing a FWHM of 16.2 nm × 27.9 nm. (e) Intensity distribution in the focal plane. (f) Measured mean far-field intensity distribution. (g) Far-field intensity distribution obtained by FD simulations without apertures. On the left side the focused beam of the positive first order is seen, while on the right side the divergent beam of the negative first order. The inset shows the simulated focal spot with a FWHM of 12.1 nm × 15.4 nm. The color bar of (f,g) is scaled logarithmically. Scalebars (same as Fig. 2[link]): (a,b) vertical 50 nm, horizontal 10 µm, (c–e) 25 nm, (f) q = 0.10 nm−1, (g) q = 0.26 nm−1, inset (g) 25 nm.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 28| Part 5| September 2021| Pages 1573-1582
https://doi.org/10.1107/S1600577521006159
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