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Figure 5
Comparison of the X-ray beam path using XBIC and ptychography. (a) XBIC measurement of an off-axis illuminated MZP with apertures. (b) Convolution of the ptychographically reconstructed probe with a nanowire profile. (c) The corresponding ptychographic reconstruction. The dashed line is the plane of focus; the solid line is the plane of measurement. (d) Line profile in the focus plane and (e) the measurement plane. Scalebars (a–c) vertical 100 nm, horizontal 10 µm, (d,e) 100 nm

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 28| Part 5| September 2021| Pages 1573-1582
https://doi.org/10.1107/S1600577521006159
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