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Figure 13
Calculated rocking curves (curve 1) from an Mo/Si multilayer with sectioned multilayer depth Lx = lPen = 38.2 µm. The diffraction curves (curve 2) are also presented, taking into account the instrumental function. The angular resolutions (a) are Δη = 0.02 µm−1 and (b) Δη = 0.1 µm−1, while the periods of the interference fringes are (a) η0 = 0.1646 µm−1 and (b) η0 = 0.335 µm−1.

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