NanoMAX: the hard X-ray nanoprobe beamline at the MAX IV Laboratory

Johansson, U.; Carbone, D.; Kalbfleisch, S.; Björling, A.; Kahnt, M.; Sala, S.; Stankevic, T.; Liebi, M.; Rodriguez Fernandez, A.; Bring, B.; Paterson, D.; Thånell, K.; Bell, P.; Erb, D.; Weninger, C.; Matej, Z.; Roslund, L.; Åhnberg, K.; Norsk Jensen, B.; Tarawneh, H.; Mikkelsen, A.; Vogt, U.

doi:10.1107/S1600577521008213

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Figure 10
(a)–(d) Direct and ptychographic spatial resolution measurements of a Siemens star pattern in tantalum. (a) Total yield fluorescence emission of the 50 nm central part, measured at 10 keV excitation energy. (b) Same as A but measured at 22 keV. (c) Ptychography reconstructed phase image of the Siemens star measured at 10 keV. (d) Close-up of the 50 nm features in (c). Scalebar in (c) is 2 µm. (e)–(h) Direct spatial resolution measurement of periodic chromium line patterns on a silicon nitride window with 50/50 nm wide lines/separations measured at 16 keV in XRF. (f) and (h) Line profiles (blue) integrated from the rectangles in (e) and (g), respectively, and the simulated profiles (red).

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 28| Part 6| November 2021| Pages 1935-1947

https://doi.org/10.1107/S1600577521008213

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