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Figure 4
Monochromatic X-ray beam profile on the secondary source aperture measured at 14 keV. Secondary source aperture sizes for different operation modes are indicated in the intensity profile. From small to large aperture: full coherence illumination, high flux illumination and 100 nm spot size at the KB-focus. The scale bar is 25 µm. Intensity profiles in the vertical and horizontal directions show a FWHM of 160 µm (H) × 10 µm (V).

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ISSN: 1600-5775
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