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Figure 13
(a) X-ray interference image acquired by the XI with thin S and A wafers. Interference images of Au mesh (400 line-space inch−1) acquired by XI with thinned wafers (b) and conventional XI (1 mm-thick wafers) (c). Image (c) is blurred in the diffraction direction (vertical direction) by the Borrmann fan effect.

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SYNCHROTRON
RADIATION
ISSN: 1600-5775
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