Figure 5
(a)–(c) Normalized (dark image and flat-field corrected) projections of the Siemens star in absorption contrast mode. The scale bar corresponds to 3 µm. The dark ring corresponds to 200 nm feature sizes, the light ring to 100 nm feature sizes and the smallest features on the Siemens star are 50 nm. (d) Histogram of the above images. The width of the main peak is equal for the Si-111 DCM and Mo/B4C MLM stripe and much narrower for the blurrier image acquired with the Ru/B4C MLM stripe. |