Figure 6
(a)–(c) Normalized (dark image and flat-field corrected) projections of the Siemens star acquired with the three different energy bandwidths in negative Zernike phase contrast mode. The black scale bar corresponds to 3 µm. The bright ring corresponds to 200 nm feature sizes, the dark ring to 100 nm feature sizes and the smallest features of the Siemens star are 50 nm. (d) Histograms of the above images. While the Si-111 DCM and Mo/B4C-MLM show a very similar behavior, the blurriness on the image for the Ru/B4C-MLM also shows in a reduced width of the histogram. |