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Figure 4
Comparison of experimentally determined profiles of the horizontal linear polarized beam (a, b) after and (c, d) before upgrading the M3 mirror. The photon energies were 100 eV (a, c) and 400 eV (b, d) using the 300 and 1000 lines mm−1 VLSGs, respectively. The exit-slit width was 30 µm for all measurements. The beam profiles are the images seen from the upstream side. Integrated intensities along the vertical and horizontal axes are shown on the upper and right sides of each panel, respectively.

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