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Figure 5
(a) Photon energy dependence of the beam profile of the horizontal linear polarized light (1000 lines mm−1 VLSG and exit-slit width of 30 µm). The beam profiles correspond to the image seen from the upstream side. (b) Plots of FWHMs of beam spots in the vertical and horizontal directions against photon energy. The FWHMs of beam spots using the 300 and 1000 lines mm−1 VLSGs are shown by squares and circles, respectively. Solid linear lines are results of the least-squares fitting of the circles between 200 and 1000 eV with the 1000 lines mm−1 VLSG, and dashed lines correspond to lines shifted by ±10 µm (horizontal) and ±1.5 µm (vertical).

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