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Figure 6
Exit-slit dependence of beam profiles in (a) the horizontal and (b) the vertical directions. The horizontal linear polarized light with energy of 400 eV was used. The beam profiles were acquired by 1D scans along the white lines in the panel (c), which shows a beam spot obtained by a two-dimensional scan. The open circles are the measured data and solid lines are results of least-squares fitting by single or multiple Gaussian functions. The H- and V-FWHMs are plotted in panel (d) for 400 and 100 eV light using circles and squares, respectively.

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