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Figure 3
X-ray test chart (NTT-AT XRESO-50HC) images. (a) Absorption-contrast image, and (b) phase-contrast image with ZPP. Panels (a-1) and (b-1) show averaged 50-shot images of each with 100 ms exposure; (a-2) and (b-2) show enlarged images of the area indicated by the red squares in (a-1) and (b-1), respectively; (a-3) and (b-3) show single-shot images of the same positions of (a-2) and (b-2) with 100 ms exposure. The area indicated by the arrow corresponds to a 100 nm line and space, which can be clearly identified in both absorption- and phase-contrast images. Comparing the 100 ms single-shot and the 100 ms averaged 50-shot case, similar images were obtained with only a difference in the signal-to-noise ratio, which indicates good temporal stability.

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