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Figure 6
Overview and performance of the sample stage. Panels (a) and (d) show CAD models of the sample stage. The key components are enumerated: 1 – base long-travel-range X,Z stage; 2 – high-load vertical stage; 3 – scanner/rotary stage assembly; 4 – Invar reference frame; 5 – laser interferometry system. Panels (b) and (c) are photographs of the sample stage installed at the SRX beamline. Panel (e) shows a comparison between a 5 Hz raster scan encoded by the built-in scanner encoder (black line) and the external laser interferometer (red line). The interferometer readings are offset for clarity. Panel (f) shows a 50 nm step-scan performed at the beamline; the background noise level does not exceed 5 nm peak-to-peak amplitude.

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