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Figure 3
JIMA resolution target; enlarged view of 0.8 µm lines; detail and a plot through lines. The circles in the blue insert are normalization artefacts due to beam instabilities. |
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Figure 3
JIMA resolution target; enlarged view of 0.8 µm lines; detail and a plot through lines. The circles in the blue insert are normalization artefacts due to beam instabilities. |