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Figure 4
Result of the meridional thermal deformation for different D. Displacement Uy (a) and slope error (b) along the meridian of the footprint are plotted. As D increases, thermal deformation changes from convex to concave. |
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Figure 4
Result of the meridional thermal deformation for different D. Displacement Uy (a) and slope error (b) along the meridian of the footprint are plotted. As D increases, thermal deformation changes from convex to concave. |