Figure 13
Beams in the focus position taken from backpropagation calculations with the Hartmann wavefront sensor at λ = 15 nm. The diameter of the spot size in the variable delay beam path (a) amounts to 19 µm (FWHM) and 14 µm (FWHM) at a focal length of 3.1 m and in the fixed delay beam path (b) amounts to 7 µm (FWHM) and 11 µm (FWHM) at a focal length of 3.2 m in the horizontal and vertical directions, respectively. |