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Figure 5
Slope deviation of the mirrors (a) DL1 and (b) DL2 over the delay range as measured by the interferometric system. The peak-to-valley value of the slope deviation amounts to Δϑ = 80 µrad for DL1 and Δϑ = 165 µrad for DL2 over the whole delay path. The angular deviation of the beam is compensated by the closed feedback interferometer system acting on the mirrors, yielding a correction precision of δϑ = 0.66 µrad (r.m.s.) (red line, see text).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 30| Part 2| March 2023| Pages 479-489
https://doi.org/10.1107/S1600577523000395
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