Figure 7
Calibration measurement of the relative pulse intensity measurement device (PATIM detector) at a wavelength of λ = 8.5 nm on a shot-to-shot basis with respect to the GMD in the hall. Over the considered pulse energy range, the absolute energy deviation is δEpulse ≃ 4 µJ (r.m.s.). The pulse energy measured by the tunnel GMD is simultaneously obtained and given as a reference with δEpulse < 2 µJ. |