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Figure 7
Aberration coefficients and spatial resolution in Elmitec LEEM. Panels (a) and (b) show calculated spherical (C3) and chromatic (Cc) aberration coefficients at three different energies 1 eV, 10 eV and 30 eV along with the [1/\sqrt E] interpolation. The red squares in (a) are the experimentally measured C3 for different energies with real space micro-LEED. (c) Schematic of the real space micro-LEED for measuring spherical aberrations in the microscope. (d) Experimental real space image of the Si(111) surface, with electron energy 5.4 eV, illumination aperture 10 µm, defocus 25 mA. (e) Comparison of the resolution and transmission for the Elmitec microscope with and without the aberration corrector. Electron energy E = 10 eV, and the electron energy spread is 0.25 eV. The correction was carried out by removing only the third-order spherical and chromatic aberrations.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 30| Part 2| March 2023| Pages 468-478
https://doi.org/10.1107/S160057752300019X
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