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Figure 2
Theoretically calculated focusing efficiencies of kinoform zone plates suitable for GS-EBL for soft X-rays. (a) Illustrations of zone profile for KZPs. The thickness is shown in terms of the phase shift. An ideal kinoform lens has a vertical sidewall on one side; a fabricated kinoform zone plate, e.g. HSQ-KZP, has slopes on both sidewalls. Each zone of a real KZP is then divided into three regions with different transition function F(θ). m and n describe the relative position of the gap and the top of the KZP in the zone (0 < m < n < 1). (b) The calculated efficiency of the HSQ-KZP with thickness of 700 nm as a function of m and n at 500 eV, based on the thin grating approximation. (ce) Theoretical calculations of the focusing efficiency of Au-FZP, PMMA-KZP (m = 0.2, n = 1) and HSQ-KZP (m = 0.2, n = 1) based on the thin grating approximation as a function of both the photon energy and the lens thickness in the soft X-ray region (0–1 keV).

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