High-efficiency focusing and imaging by dielectric kinoform zone plate lenses with soft X-rays

Tong, X.; Chen, Y.; Xu, Z.; Li, Y.; Xing, Z.; Mu, C.; Zhao, J.; Zhen, X.; Mao, C.; Tai, R.

doi:10.1107/S1600577522012115

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Figure 3
Overview of the fabrication procedures. (a) Schematic illustration of greyscale electron beam lithography (GS-EBL) for the HSQ-KZP lens as an example. (b) The calculated dose gradient pattern for the HSQ-KZP lens by GS-EBL. (c) Dose distribution curves for the HSQ-KZP in which the greyscale proximity effect correction (GS-PEC) was applied. (d) Micrographs by SEM of the cross-sectional view at a tilt of 45° for the fabricated KZP lenses in HSQ. (e) The whole fabricated HSQ-KZP lens. (f) Close-up view at a tilt of 75° of the replicated HSQ-KZP zones. (g) Cross-sectional view at a tilt of 45° of the PMMA-KZP lens.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 30| Part 2| March 2023| Pages 319-326

https://doi.org/10.1107/S1600577522012115

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