view article
Figure 4
Results of soft X-ray imaging tests for the fabricated HSQ kinoform zone plate. (a) SEM image (left) of the in-house-made Siemens stars with resolution of 30 nm and soft X-ray image (right) of the same target at 500 eV with photon flux of 5 × 109 photons s−1. The dwelling time is 1 ms and step size is 50 nm, using the HSQ-KZP lens as focusing component. (b) SEM image and soft X-ray STXM image of the magnified central part of the Siemens star, using the HSQ-KZP lens at 500 eV with dwelling time of 1 ms and 25 nm step size. The colour bars in (a) and (b) are normalized photon flux. (c) Image of an in-house-made grating with variable pitches, on which the red arrow line shows the scanning with a dwelling time of 2 ms and step size of 30 nm, using the HSQ-KZP lens as focusing component. (d) Intensity profile of the test grating over 50 pitches as outlined in (c) by the red arrow line.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 30| Part 2| March 2023| Pages 319-326
https://doi.org/10.1107/S1600577522012115
Follow J. Synchrotron Rad.
Sign up for e-alerts
E-alerts
Follow J. Synchrotron Rad. on Twitter
Twitter
Follow us on facebook
Facebook
Sign up for RSS feeds
RSS