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Figure 5
(a, b) Focusing spot profiles for soft X-rays by the HSQ-KZP and the PMMA-KZP lens measured by knife-edge scan method with dwell time of 1 ms and step size of 25 nm, where the dots are the raw data, the solid lines are the fitting curves and the dash lines are the first-order differentials of the raw data. The first-order derivatives of the scanned curves give rise to a full width at half-maximum (FWHM) of 110 nm for the HSQ-KZP lens and 125 nm for the PMMA-KZP lens. (c) Comparison between the measured focusing efficiencies of HSQ-KZP and the theoretical ones using the BPM-QDHT approach. (d) Measured focusing efficiencies of the PMMA-KZP lens compared with its theoretical value calculated by the BPM-QDHT approach. (e, f) Comparison of X-ray radiation damage to the dielectric zone plates by the SEM images of the outermost zones in the HSQ-KZP lens and the PMMA-KZP lens, after 12 h soft X-ray radiation in the tests.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 30| Part 2| March 2023| Pages 319-326
https://doi.org/10.1107/S1600577522012115
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