Single-pulse characterization of the focal spot size of X-ray free-electron lasers using coherent diffraction imaging

Gao, Z.; Fan, J.; Tong, Y.; Zhang, J.; He, B.; Nie, Y.; Luan, H.; Lu, D.; Zhang, D.; Yuan, X.; Wang, Y.; Liu, Z.; Jiang, H.

doi:10.1107/S1600577523000887

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Figure 7
(a) SEM image of one typical damaged area on the silicon wafer. Its ablation area is marked with a yellow circle. The two white lines show the x and y diameters of the ablation area. (b) 3D-CLSM image of the damaged area shown in (a); the deepest part is about 7 µm from the surface. (c) The X and Y diameters of the 14 ablation areas are measured and displayed as points. The two straight lines are the average values of the X (gray line) and Y (black line) diameters.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 30| Part 3| May 2023| Pages 505-513

https://doi.org/10.1107/S1600577523000887

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