view article
Figure 3
Design drawing of the two resolution targets and the corresponding SEM images of the Siemens star pattern. (a) 30 nm finest features from ZEISS; (b 50 nm finest features from ANT.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 30| Part 4| July 2023| Pages 815-821
https://doi.org/10.1107/S1600577523003168
Follow J. Synchrotron Rad.
Sign up for e-alerts
E-alerts
Follow J. Synchrotron Rad. on Twitter
Twitter
Follow us on facebook
Facebook
Sign up for RSS feeds
RSS