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Figure 4
Results of the Siemens star pattern tests for the different resolution modes. (a–c) Results for high-resolution mode. (a) Siemens star pattern with 30 nm finest feature size as indicated by circle L1 by absorption contrast, with an insert of an enlarged quarter of the center in high-resolution mode at 8 keV. (b) Line profile of L1. (c) Power spectrum density analysis on the star patterns by absorption contrast (a). (d–f) Results for medium-resolution mode. (d) Siemens star pattern with 50 nm finest feature size as indicated by circle L2 by absorption contrast, with an insert of an enlarged quarter of the center in medium-resolution mode at 5.2 keV. (e) Line profile of L2. (f) Power spectrum density analysis on the star patterns by absorption contrast (d).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 30| Part 4| July 2023| Pages 815-821
https://doi.org/10.1107/S1600577523003168
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