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Figure 7
Estimation of the radiation dose delivered in a ptychography measurement. (a) Schematic of the overlap of the X-ray spot; yellow color represents the region of overlap, green is indicated to identify a single X-ray beam spot. (b) Plot of weight factor as a function of d/R. (c) Schematic of the overlap regions of a focused beam of 60 nm diameter with step size of 30 nm in a 2 µm × 2 µm region. The color bar represents the number of times a region is exposed. (d) Schematic of the overlap regions of a defocused beam of 500 nm diameter with step size of 50 nm in a 2 µm × 2 µm region. The color bar represents the number of times a region is exposed. The scale bars in (c) and (d) represent 500 nm. (e) Histogram of the number of overlaps of focused and defocused beam shown in (c) and (d). (f) Plot of dose change on the BN sample at 192 eV using different beam sizes.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 30| Part 4| July 2023| Pages 746-757
https://doi.org/10.1107/S1600577523003399
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