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Figure 4
Surface roughness (blue symbols, left ordinate) and stress (red symbols, right ordinate) of 60 nm-thick WSi2 films versus Ar pressure. Broken lines are guides to the eye.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 30| Part 4| July 2023| Pages 708-716
https://doi.org/10.1107/S1600577523003697
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