view article
Figure 1
Illustration of a synchronous (a) and asynchronous (b) control loop with tasks split across a beamline, and user software environment. (c) Simplified schematic of the measurement protocol consisting of XRR acquisition, instantaneous ML-based online data analysis and thin-film growth control based on closed-loop feedback. Based on preceding measurements a time estimate to reach the predefined thickness is established to stop the growth process.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 30| Part 6| November 2023| Pages 1064-1075
https://doi.org/10.1107/S160057752300749X
Follow J. Synchrotron Rad.
Sign up for e-alerts
E-alerts
Follow J. Synchrotron Rad. on Twitter
Twitter
Follow us on facebook
Facebook
Sign up for RSS feeds
RSS