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Figure 5
ML-controlled thin-film deposition. (a) Exemplary measurements and fits based on online data analysis. The experimental data are acquired using fast, real-time scans, thus the poor counting statistics around q ≃ 0.11 Å−1 are due to the limited number of absorber changes. (b) Target thicknesses in closed-loop operation versus actually measured thicknesses after the closed-loop feedback terminated the growth. Target thicknesses were defined in 25 Å steps starting from 75 Å. Profiles shown in (a) correspond to a subset of data points shown in (b).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 30| Part 6| November 2023| Pages 1064-1075
https://doi.org/10.1107/S160057752300749X
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