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Figure 5
Histograms of the measured RMS height errors (bottom axis) and RMS phase errors (top axis) of all subareas with size (x × l) 100 m × 100 m (a) and 200 m × 200 m (b) over the entire Si(531) crystal. |
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Figure 5
Histograms of the measured RMS height errors (bottom axis) and RMS phase errors (top axis) of all subareas with size (x × l) 100 m × 100 m (a) and 200 m × 200 m (b) over the entire Si(531) crystal. |