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Figure 2
Diagram of the focusing mirror and arrangement of the piezoelectric ceramics. (a) The linearly changing thickness of the prototype silicon mirror is shown in a side view. Two long actuators (19 and 20) near the optical area are used to adjust the overall shape of the mirror to an ellipse. The small actuators 1–18 are used to adjust the overall shape and compensate the figure error of the elliptic surface to improve the focusing performance of this mirror. (b) Corresponding photograph of the prototype mirror.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 31| Part 1| January 2024| Pages 10-16
https://doi.org/10.1107/S1600577523009566
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