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Figure 6
Measured step size Δz of the fast-scanning motor with and without the load applied by the indenter. The nominal step size was 100 nm.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 31| Part 1| January 2024| Pages 42-54
https://doi.org/10.1107/S1600577523010093
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