Sub-micrometre focusing of intense 100 keV X-rays with multilayer reflective optics

Koyama, T.; Yumoto, H.; Miura, T.; Matsuzaki, Y.; Yabashi, M.; Ohashi, H.

doi:10.1107/S1600577524000213

Journal of Synchrotron Radiation Journal of
Synchrotron Radiation

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Figure 11
The scanning transmission image of a tantalum Siemens star chart. We used 100 keV X-rays with a focusing-beam size of 0.25 µm (V) × 0.26 µm (H). The structure of 200 nm line and space was clearly observed.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 31| Part 2| March 2024| Pages 276-281

https://doi.org/10.1107/S1600577524000213

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