Figure 5
Typical height error profiles on the mirror including 0th and 1st harmonics (HEP1) (a), 0th, 1st and 20th harmonics (HEP2) (b), and 0th, 1st, 20th and 40th harmonics (HEP3) (c) produced by the waviness widget in OASYS. The corresponding residual wavefront error (d) and residual wavefront error derivative (e) are calculated by the model described in Section 2 and plotted by a relative vertical shift. |