Figure 3
(a) Total photon flux (red), horizontal coherence length (blue), and (b) resolving power at the mask plane of beamline branch B for different SSA sizes. The resolving power is shown as a function of SSA height because the energy resolution of the PGM is defined only by the vertical SSA size. The grey dotted lines correspond to the maximum SSA size that provides coherent illumination of a representative grating mask (see Fig. 7). |