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Figure 3
(Left) Schematics of the in situ thickness-uniformity measurements inside of the sputtering chamber. (Right) Measured transmission intensity profile with a laser and photodiode for one sample.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 31| Part 5| September 2024| Pages 1050-1057
https://doi.org/10.1107/S1600577524006854
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