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Figure 4
(Top left) Photograph of MOS installed on the deposition chamber. (Top right) Laser array collected by the camera. (Bottom) Measured curvature change along both the horizontal and the vertical directions by changing the voltage of the piezo actuator of a deformable mirror.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 31| Part 5| September 2024| Pages 1050-1057
https://doi.org/10.1107/S1600577524006854
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