Development of an advanced in-line multilayer deposition system at Diamond Light Source

Wang, H.; Majhi, A.; Tan, W.J.; Singhapong, W.; Morawe, C.; Sawhney, K.

doi:10.1107/S1600577524006854

Journal of Synchrotron Radiation Journal of
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Figure 5
Measured XRR (black bubbles) and fitted profile (solid red line) of a W single layer of 23.48 nm thickness, 19.3 g cm⁻³ density and 0.36 nm roughness. The XRR is performed at E = 8048 eV.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 31| Part 5| September 2024| Pages 1050-1057

https://doi.org/10.1107/S1600577524006854

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