Development of an advanced in-line multilayer deposition system at Diamond Light Source

Wang, H.; Majhi, A.; Tan, W.J.; Singhapong, W.; Morawe, C.; Sawhney, K.

doi:10.1107/S1600577524006854

Journal of Synchrotron Radiation Journal of
Synchrotron Radiation

IUCr IT WDC

home archive editors for authors for readers submit open access

view article

Figure 6
Measured XRR profiles of two Cr/C MLs with two distinct working gas pressures of (top) 1.0 × 10⁻³ mbar and (bottom) 3.1 × 10⁻³ mbar. Both the Cr/C MLs are deposited in dynamic mode.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 31| Part 5| September 2024| Pages 1050-1057

https://doi.org/10.1107/S1600577524006854

Open

access

Follow J. Synchrotron Rad.

Search IUCr Journals		doi		Advanced search
Author		volume	page