Development of an advanced in-line multilayer deposition system at Diamond Light Source

Wang, H.; Majhi, A.; Tan, W.J.; Singhapong, W.; Morawe, C.; Sawhney, K.

doi:10.1107/S1600577524006854

Journal of Synchrotron Radiation Journal of
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Figure 7
(Top) Photograph of a 2000 mm-long sample holder with Si substrates mounted on top. (Bottom left) Measured XRR profile of the periodic 20-layer pair Cr/C ML fabricated in dynamic mode. (Bottom right) Periodic thickness (d) variation as a function of length over 2000 mm.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 31| Part 5| September 2024| Pages 1050-1057

https://doi.org/10.1107/S1600577524006854

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