Development of an advanced in-line multilayer deposition system at Diamond Light Source

Wang, H.; Majhi, A.; Tan, W.J.; Singhapong, W.; Morawe, C.; Sawhney, K.

doi:10.1107/S1600577524006854

Journal of Synchrotron Radiation Journal of
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Figure 8
XRR profile of lateral-graded W/B₄C ML over 120 mm length at three positions: 0 mm (middle) and (two edge) −60 mm and 60 mm. The period thickness varied from 3.52 nm to 6.56 nm. The inset of the figure indicates the variation of the period.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 31| Part 5| September 2024| Pages 1050-1057

https://doi.org/10.1107/S1600577524006854

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