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Figure 8
The setup for measurement of thermally induced deformation. The numbered labels denote 1 – the ZYGO VeriFire 4 laser interferometer, 2 – the CO2 laser, 3 – the power meter, 4 – the sample and 5 – the 5D table. |
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Figure 8
The setup for measurement of thermally induced deformation. The numbered labels denote 1 – the ZYGO VeriFire 4 laser interferometer, 2 – the CO2 laser, 3 – the power meter, 4 – the sample and 5 – the 5D table. |