Figure 5
The efficiency of a multilayer laminar grating is plotted as a function of cff at several energies between 600 and 3000 eV inclusive. A Cr/C multilayer on a silicon grating was simulated [see the corresponding schematic in Fig. 1(a)], with N = 1200 lines mm−1, H = 7.5 nm, Γ = 0.74, m = −1, d = 10.5 nm, γ = 0.45 and num_periods = 50. The value of m_max was 3. |